One of our customers in Japan asked us to add the reduced pressure option to the EpiPro 5000. The customer wanted to expand the production of a very profitable product, that he is processing successfully on the Gemini 3 RP reactor, the predecessor of the EpiPro product line.
The EpiPro 5000 was modified with the reduced pressure option to deposit epi layers in the pressure range from 300 Torr to 80 Torr. This allowing a reduction in auto doping issues and the system being able to run selective epi processes.
The EpiPro 5000RP was successfully qualified at the customer's factory.