GENUINE EPIPRO AND GEMINI SPARE PARTS
CSD Epitaxy offers the trusted, genuine spare parts that are engineered to optimize the performance of your EpiPro™ 5000, EpiPro 5000IG, EpiPro 5000RP, and Gemini tools. Our parts are backed by the expertise of the original engineering team that designed the systems, the original documentation and product specifications, and years of field experience to deliver the peak tool performance that you have come to rely on. To maximize the capabilities of the tool as it was designed, only the best replacement parts available must be used for maintenance and repairs. The source that you choose for spare parts makes the difference.
CSD Epitaxy has the largest inventory in the industry of spare parts for the EpiPro 5000 systems and a large parts inventory for Gemini tools. That’s because CSD Epitaxy is the OEM manufacturer of the EpiPro 5000 and the only company with rights to the full line of Gemini tools. High tool reliability and high good wafer output is engineered into the EpiPro and Gemini tools and it can’t be imitated. You have our assurance that you are acquiring the best possible consumable and non-consumable parts and assemblies for your production tools.
Contact CSD Epitaxy with your spare parts inquiries using the contact form below, or email email@example.com. You can also contact your local sales group. For assistance in identifying an EpiPro, or Gemini, spare part or assembly, we can provide the technical support that you need to get the right parts the first time.
CSD Epitaxy is your trusted source for genuine spare parts for your EpiPro and Gemini production tools. Let us work together.
GAS INTERLOCK PCB34
MOTOR, ROTATION ASSEMBLY
AIR CYLINDER, TRANSFER SWITCH
You can contact us regarding any of our products by calling us on ... or using the form below: